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Development and application trends of purification technical equipment

With the development of high-tech comprehensive new science and technology. Specializing in clean technology and provide a clean environment and production technology used in production of various high purity media, effective control of trace impurities, to ensure yield and high-tech products can be applicable. Clean technologies typically include: air purification, air-conditioning technology, water purification technology, gas purification technologies, trace impurity control technology, clean technology and environmental monitoring related to environmental quality control technology. Decontamination technology are widely used in electronics, the nuclear, aerospace, biotechnology, pharmaceuticals, precision machinery, chemicals, food, automotive and other high-tech industries and modern science.

Terms for semiconductor equipment, decontamination technology plays an important role in microelectronics technology.Microelectronic technology is the core of integrated circuits, and integrated circuit manufacturing process environment and process for its purification technology and equipment in the proposed strict requirements. During the efforts to develop micro-focused information industry. Technical level of decontamination, in a sense has become a measure of a country and regional science and technology and industry standards are an important symbol.

Along with improved living standards, people live environment and higher and higher demands of quality life, water purification equipment, has been prepared by the high water is generally welcomed, decontamination technology has begun to enter millions of households, access to people's modern life.

China's clean technology and equipment compared with advanced countries, the gap is obvious, we only started productin HEPA filter 1965, fifteen years later than abroad. 1975 production of light scattering airborne particle counter later than two decades abroad. 0.1 micron technology and equipment, cl the advanced countries in the international arena has become a mature technology, China has just started.

The world's advanced industrial countries to meet the ultra-clean technology, a large number of efficient use of filters has never been interrupted for several years in the development of different structures with different properties of new products, the United States since 1979, started to develop 0. 1 micron ULPA filter, 1984, U.S. AAF company began production of 0.1 micron ULPA filter without partition, the current 0.1-micron ULPA filter AAF company in the United States, FLANDERS companies and CAMBRIDGE company has formed a commercial production. Japan has become the world's production of 0.1 micron ULPA filter manufacturers than any other country, variety, product series, especially the low loss type of 0.1-micron ULPA filters developed to solve the initial resistance to major technical problems. The international market for high efficiency air filter is in great demand, and every year increase in sales in Japan more than 1 million units per year, according to the average price of 200 U.S. dollars each calculation, sales reached 200 million U.S. dollars. China's demand for high efficiency air filter market, close to 100,000 units per year, accounting for the international market of 2% to 4%, but has yet to produce 0.1-micron ULPA filters for large scale integrated circuit production plant and a variety of clean high-tech clean room of 0.1 micron ULPA filter now also be imported.

In the clean room construction scale and technical level, the greater the gap between China and developed countries. Shimizu, a Japanese construction company, during the period 1982 to 1987, construction of clean room area of 718,000 square meters, and our current one-year construction of the clean room is less than the total area of 100,000 square meters, but more during the Eighth Five-Year great development of the total area,in 1993 ,we has constructed cleanroom nearly 15 million square meters. America's larger clean room construction, in 1998 reached 1.885 million square meters of Statistics. The level of engineering technology in clean, late 80s, has a large number of foreign countries into 0.1 micron ultra-clean rooms, Niigata Sanyo factory in 1987 built 10 clean room of 3000 square meters, NIT logs into four 1,000 square m 0.1 micron dust control 1000 plant, air changes of up to 300 beats / min. U.S. new plant in Taiwan TSMCS the fourth generation of pipeline have been completed and a total area of the clean room of 10,000 square meters. 0,1 micron used in China mainly relies on 10 clean room imported from abroad. As the high cost of clean-level clean room is very expensive, 0.1 micron ten clean room construction cost per square meter up to 1 million or more. In the large scale integrated circuit manufacturing equipment investment in the clean room occupies a very high percentage, which is constantly updated IC technology, product life cycles, incompatible with the development trend of more and more rapidly, severely restricted the large scale integrated circuit technology development. U.S. ASYST, Germany's development of the company's use of isolation MW sub-micron technology production equipment and technology, micro-environmental systems in recent years been widely used. The latest clean technology in the class 100 cleanroom cleanliness, the use of process equipment isolation technology using local micro-environment, the investment ratio of compression to the high-level micro-environment, eliminating the operator and the process equipment of secondary sources runs generated on the IC yield and can be applicable.

Clean technology and equipment in the international market is huge in Japan to the late 80s, early 90s clean technology and equipment sales have exceeded 3.5 billion U.S. dollars. Developed countries such as the United States and Western Europe based on clean equipment and parts sales reached 7.3 billion U.S. dollars. According to the China Electronic Production Equipment Industry Association statistics, China's major eight largest purification plant of the sales of 82.17 million yuan in 1990, less than 100 million in 1993 to reach 144.95 million yuan, accounting for 0.34% of sales in the international market . But with the rapid development of China's high-tech and microelectronics industry, optical industry, liquid crystal display industry and optoelectronic devices industry, biotechnology, pharmaceutical industry, China's potentially huge market of clean technologies has increased as  40% to 50% per year.